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Radio frequency MEMS switch contact metal selection
 
   
Document Number
US Patent 7235750
Issued Date
June 26, 2007
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Inventors
Kladitis; Paul E. (New Carlisle, OH)
Leedy; Kevin D. (Centerville, OH)
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Abstract
A method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This method includes a review of alloy experience, consideration of equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact electrical resistance performance. After determination of a candidate alloy material, MEMS switches are conceptualized, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 ohms are achieved for micro-switches with gold (Au) and gold-platinum (Au-(6.3 at %)Pt) alloy contacts. In addition, `hot-switched` life cycle test results of 1.02.times.10.sup.8 and 2.70.times.10.sup.8 cycles may be realized for micro-switches with Au and Au-(6.3 at %)Pt contacts. These results indicate increased wear with a small increase in contact resistance for MEMS switches with metal alloy electric contacts.
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Radio frequency MEMS switch contact metal selection - US Patent 7235750 Drawing
Drawing from US Patent 7235750
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Number of Claims:
16
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Published
June 26, 2007
Application Number
11/047,344
Filed
January 31, 2005
US Classification
200/181   257/411 257/414 335/78 438/107 438/109
Int'l Classification
H01H   57/00   (20060101)  
Examiner
Attorney/Law Firm
USPTO Field of Search
200/181   335/78   257/411   257/412   257/413   257/414   257/531   438/107   438/108   438/109   438/110  
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