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Self-aligned rear electrode for diode array element
 
   
Document Number
US Patent 7235832
Issued Date
June 26, 2007
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Abstract
A PIN active pixel sensor array including self aligned encapsulated electrodes and a method for forming the same the method including forming an electrically conductive layer over a substrate; forming a first doped semiconducting layer over the conductive layer; photolithographically patterning and etching through a thickness portion of the first doped semiconducting layer and conductive layer to expose the substrate to form a plurality of spaced apart electrodes having an upper portion comprising the first doped semiconducting layer; blanket depositing a second doped semiconducting layer to cover the spaced apart electrodes including the exposed substrate; and, etching through at least a thickness portion of the second doped semiconducting layer.
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Number of Claims:
13
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Published
June 26, 2007
Application Number
11/053,066
Filed
February 7, 2005
US Classification
257/292   257/458 257/E27.132 257/E27.133
Int'l Classification
H01L   31/075   (20060101)  
Examiner
Parent Case
This application is a divisional of 10/386,871 now U.S. Pat. No. 6,852,566 filed on Mar. 12, 2003.
USPTO Field of Search
257/458   257/292  
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