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Carbon nanotubes with controlled diameter, length, and metallic contacts
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Document Number
US Patent 7250366
Issued Date
July 31, 2007
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Inventors
Dubin; Valery M.
(Portland, OR)
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Abstract
Some embodiments of the present invention include fabricating carbon nanotube bundles with controlled length, diameter, and metallic contacts.
Patent Report
Tags:
carbon
nanotubes
controlled
diameter
length
metallic
contacts
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Description:
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Clever 0%
Complex 0%
Efficient 0%
Historic 0%
Important 0%
Innovative 0%
Interesting 0%
Practical 0%
Simple 0%
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Number of Claims:
23
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Owner
Intel Corporation
(Santa Clara, CA)
Published
July 31, 2007
Application Number
11/082,000
Filed
March 15, 2005
US Classification
438/674
257/E23.165 977/742
Int'l Classification
H01L 21/44 (20060101)
Examiner
Vu; David
Attorney/Law Firm
Guglielmi; David L.
USPTO Field of Search
257/20 257/24 257/40 257/758 257/E51.04 438/622 438/623 438/626 438/674 438/691 977/742
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