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Semiconductor integrated circuit
   
Document Number
US Patent 7271488
Issued Date
September 18, 2007
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Abstract
A semiconductor integrated circuit having a plurality of interconnect layers and at least one via connecting interconnects of two adjacent interconnect layers, wherein each interconnect layer has a plurality of first interconnect groups and second interconnect groups arranged respectively in a row and a column in a matrix. The first and the second interconnect groups are alternately arranged in each row and in each column of the matrix arranged facing each other between two adjacent interconnect layers. The first and second interconnect groups facing each other between the layers have crossing parts where they can be connected through vias.
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Number of Claims:
10
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Published
September 18, 2007
Application Number
11/312,709
Filed
December 21, 2005
US Classification
257/758   257/780 257/781 257/E23.144 257/E23.145
Int'l Classification
H01L   23/48   (20060101)   H01L   23/52   (20060101)   H01L   29/40   (20060101)  
Assistant Examiner
Priority Data
Jan 11, 2005 [JP] P2005-003781
USPTO Field of Search
257/758   257/E23.145  
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