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Fabrication of aligned nanowire lattices
 
   
Document Number
US Patent 7276424
Issued Date
October 2, 2007
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Inventors
Wei; Qingqiao (Corvallis, OR)
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Abstract
Methodologies associated with fabricating aligned nanowire lattices are described. One exemplary method embodiment includes providing a twist wafer bonded thin single crystal semiconductor film and a bulk single crystal substrate of the same material. Periodic non-uniform elastic strains present on the surface of the film control the positions where nanocrystals will form on the film. The strains may be removed via annealing and alloying after the formation of nanocrystal arrays.
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Number of Claims:
14
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Published
October 2, 2007
Application Number
11/169,470
Filed
June 29, 2005
US Classification
438/406   257/E27.137 257/E27.144 438/455 977/762 977/938
Int'l Classification
H01L   21/76   (20060101)  
Examiner
USPTO Field of Search
438/769   438/775   438/777   438/406   438/455   257/314   257/315   257/316   257/E27.137   257/E27.144   977/762   977/938  
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Description
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