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Resistance variable memory device and method of fabrication
   
Document Number
US Patent 7282783
Issued Date
October 16, 2007
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Abstract
Methods and apparatus for providing a resistance variable memory device with agglomeration prevention and thermal stability. According to one embodiment, a resistance variable memory device is provided having at least one tin-chalcogenide layer proximate at least one chalcogenide glass layer. The invention also relates to methods of forming such a memory device.
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Number of Claims:
17
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Published
October 16, 2007
Application Number
11/700,912
Filed
February 1, 2007
US Classification
257/613   257/E31.029
Int'l Classification
H01L   31/0264   (20060101)  
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Parent Case
This application is a divisional of U.S. patent application Ser. No. 10/893,299, filed Jul. 19, 2004, now U.S. Pat. No. 7,190,048, the entirety of which is hereby incorporated by reference herein.
USPTO Field of Search
257/188   257/189   257/441   257/442   257/613   257/614   257/615   257/616   257/E31.029   257/E31.03  
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