In a linear motor, each arrayed coil unit (160) of a stator yoke (151) is divided into an upper coil (161) and lower coil (162). A cooling pipe (153) is interposed between the upper coil (161) and the lower coil (162).
This is a continuation-in-part application of U.S. patent application Ser. No. 10/347,862 filed on Jan. 22, 2003 now abandoned entitled "LINEAR MOTOR, STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING APPARATUS", and U.S. patent application Ser. No. 10/674,359 filed on Oct. 1, 2003 now abandoned entitled "EUV EXPOSURE APPARATUS WITH COOLING DEVICE TO PREVENT OVERHEAT OF ELECTROMAGNETIC MOTOR IN VACUUM".
Priority Data
Jan 28, 2002 [JP] 2002-018939 Oct 23, 2002 [JP] 2002-308058
A stage system for a lithographic apparatus is presented and includes a movable stage, and a stationary motor coil assembly including coils to interact with a magnet of the movable stage to thereby form a moving magnet motor to drive the stage. The stage system also includes a position measurement system to measure a position of the stage in a working area, the position measurement system to transfer a measurement beam along a measurement beam path which extends over a part of the motor coil assembly towards the stage. The coil assembly includes a coil assembly path between the motor coils to drive the motor, the coil assembly path extending below the measurement beam path. The stage may include a substrate stage or a reticle stage.
