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Thin film transistor substrate and production method thereof
   
Document Number
US Patent 7291862
Issued Date
November 6, 2007
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Abstract
A method for producing a thin film transistor substrate includes the steps of: (i) depositing an amorphous semiconductor film on a transparent insulating substrate; (ii) patterning the amorphous semiconductor film so as to form insular amorphous semiconductor films, the step (ii) including a process (I) for forming, in respective stripe areas each of which is elongate in a first direction in a display area, a plurality of insular semiconductor films whose channel length is in line with the first direction, and a process (II) for forming, in an area including extended portions of the striped areas in a peripheral circuit area, a plurality of insular semiconductor films; (iii) polycrystallizing the insular semiconductor films in the peripheral circuit area so that the insular semiconductor films have high mobility in a second direction and polycrystallizing the insular semiconductor films in the display area so that the insular semiconductor films have high mobility in the first direction; and (iv) forming TFTs by using polycrystalline insular semiconductor films. In at least one peripheral circuit, a channel of a high speed TFT is positioned on a portion other than the extended portions of the stripe areas.
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Number of Claims:
5
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Published
November 6, 2007
Application Number
11/385,077
Filed
March 21, 2006
US Classification
257/72   257/59 257/66 257/69
Int'l Classification
H01L   29/76   (20060101)  
Examiner
Assistant Examiner
Attorney/Law Firm
Priority Data
Mar 22, 2005 [JP] 2005-081967
USPTO Field of Search
257/59   257/64   257/66   257/72   257/75   257/88  
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