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Document Number
US Patent 7298500
Issued Date
November 20, 2007
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Abstract
A position detecting apparatus for detecting position of an object disposed in a first space by receiving light from the object with a light receiving element disposed outside said first space, said position detecting apparatus includes an optical system for directing light from the object to the light receiving element, and a first optical element transmitting light from the object, disposed in a partitioning member for partitioning said first space and space outside said first space, wherein said first optical element is located on a position on or near a pupil plane or a plane conjugate to the pupil plane of said optical system.
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Number of Claims:
5
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Published
November 20, 2007
Application Number
10/771,992
Filed
February 3, 2004
US Classification
356/614   356/620
Int'l Classification
G01B   11/14   (20060101)  
Examiner
Attorney/Law Firm
Priority Data
Feb 03, 2003 [JP] 2003-026541
USPTO Field of Search
356/614  
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