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Document Number
US Patent 7301348
Issued Date
November 27, 2007
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Abstract
An electrostatic encoder comprising receiving coupling electrodes formed on a scale, and extending in a predetermined direction, transmitting coupling electrodes provided on a sensor head, and located to face the receiving coupling electrodes, digital electrodes provided on the scale to extend from the receiving coupling electrodes in a direction perpendicular to the predetermined direction, and arranged at a predetermined pitch, two pairs of interdigital electrodes provided on the sensor head, and located to face the digital electrodes, a voltage applying portion configured to apply an alternating voltage to the transmitting coupling electrodes, and a potential difference detecting portion configured to detect a potential difference between the interdigital electrodes of each of the two pairs of interdigital electrodes. The two pairs of interdigital electrodes are arranged at the same pitch, and the each pair of interdigital electrodes are spaced apart from each other by a predetermined distance in the predetermined direction.
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Number of Claims:
12
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Published
November 27, 2007
Application Number
11/195,319
Filed
August 2, 2005
US Classification
324/660   324/207.17 324/207.24 324/662 340/870.01 341/15
Int'l Classification
G01R   27/26   (20060101)   G01B   7/14   (20060101)  
Examiner
Priority Data
Aug 05, 2004 [JP] 2004-229471
USPTO Field of Search
324/207.15   324/16   324/17   324/18   324/19   324/20   324/21   324/22   324/23   324/24   324/25   324/26   324/27   324/28   324/29   324/30   324/31   324/32   324/33   324/34   324/35.17   324/207.15   324/16   324/17   324/18   324/19   324/20   324/21   324/22   324/23   324/24   324/25   324/26   324/27   324/28   324/29   324/30   324/31   324/32   324/33   324/34   324/35.25   324/658   324/660   324/662   324/683   324/686   340/562   340/870.01   340/870.32   341/15  
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