A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivarible equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.
RELATED APPLICATIONS
This application is a continuation-in-part of U.S. patent application Ser. No. 10/615,321, filed on Jul. 7, 2003 now U.S. Pat. No. 6,952,267, entitled OPTICAL BANDWIDTH METER FOR LASER LIGHT, with inventor Rafac, and is also a continuation-in-part of U.S. application Ser. No. 10/609,223, filed on Jun. 26, 2003 now U.S. Pat. No. 7,256,893, entitled METHOD AND APPARATUS FOR MEASURING BANDWIDTH OF AN OPTICAL OUTPUT OF A LASER, also with Rafac as an inventor, both assigned to the assignee of the present application, the disclosures of each of which are hereby incorporated by reference.
