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Method for removing photoresist layer and method for forming metal line in semiconductor device using the same
   
Document Number
US Patent 7309652
Issued Date
December 18, 2007
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Inventors
Ryu; Sang-Wook (Chungcheongbuk-do,KR)
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Abstract
Disclosed are a method for removing a photoresist layer and a method for forming a metal line using the same. The method for removing a photoresist pattern, including the steps of: forming a bottom layer on a substrate by using the photoresist pattern as a mask; and removing the photoresist pattern with use of a high density plasma (HDP) apparatus. The method for forming a metal line, including the steps of: preparing a semi-finished substrate including an inter-layer insulation layer; forming a photoresist pattern on the inter-layer insulation layer; forming an opening by etching the inter-layer insulation layer with use of the photoresist pattern as an etch mask; removing the photoresist pattern by using a high density plasma (HDP) apparatus; and forming the metal line by filling the opening with a predetermined material.
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Number of Claims:
17
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Published
December 18, 2007
Application Number
11/146,538
Filed
June 6, 2005
US Classification
438/689   216/12 216/41 257/E21.027 257/E21.256 257/E21.577 438/586 438/591 438/710 438/722 438/738
Int'l Classification
H01L   21/47   (20060101)  
Examiner
Assistant Examiner
Priority Data
Dec 09, 2004 [KR] 10-2004-0103720
USPTO Field of Search
438/689   216/12  
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