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Formation method of electroconductive pattern, and production method of electron-emitting device, electron source, and image display apparatus using this
   
Document Number
US Patent 7314768
Issued Date
January 1, 2008
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Inventors
Furuse; Tsuyoshi (Kanagawa-ken,JP)
Mori; Shosei (Kanagawa-ken,JP)
Terada; Masahiro (Kanagawa-ken,JP)
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Abstract
In regard to an electroconductive pattern including a high resistivity region partially, by forming a pattern with a photosensitive resin, making the pattern absorb liquid containing a metal component, and baking this, an electroconductive film of metal oxide is formed, this electroconductive film is further covered by a gas shielding layer, and portions which are not shielded are reduced selectively to be made low resistance metal film regions. Since the material which constitutes the electroconductive pattern is hardly removed, a load concerning material reuse is mitigated and material cost is reduced.
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Number of Claims:
12
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Owner
Published
January 1, 2008
Application Number
11/138,332
Filed
May 27, 2005
US Classification
438/21   257/E21.295 438/29 438/674
Int'l Classification
H01L   21/00   (20060101)   H01L   21/44   (20060101)  
Examiner
Priority Data
Jun 01, 2004 [JP] 2004-162968
USPTO Field of Search
438/21   438/29   438/674  
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