The present invention relates to a method for fabricating a semiconductor device capable of preventing bridge formation caused by damages to a capacitor oxide structure including a phosphosilicate glass (PSG) layer and a tetraethylorthosilicate (TEOS) layer during a wet cleaning process. The method includes the steps of: forming a PSG layer on a substrate; forming a capping layer on the PSG layer; forming a TEOS layer on the capping layer; selectively etching the TEOS layer, the capping layer and the PSG layer to form a plurality of openings exposing predetermined portions of the substrate; cleaning the openings; forming a conductive layer on the openings; and removing the conductive layer until the TEOS layer is exposed, so that the conductive layer is isolated for each opening.
