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Phase changeable memory cells and methods of fabricating the same
   
Document Number
US Patent 7329579
Issued Date
February 12, 2008
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Inventors
Ha; Yongho (Kyeonggi-Do,KR)
Yi; Jihye (Kyeonggi-Do,KR)
Kim; Hyunjo (Kyeonggi-Do,KR)
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Abstract
A phase changeable memory cell is disclosed. According to embodiments of the invention, a phase changeable memory cell is formed that has a reduced contact area with one of the electrodes, compared to previously known phase changeable memory cells. This contact area can be a sidewall of one of the electrodes, or a perimeter edge of a contact opening through the electrode. Thus, when the thickness of the electrode is relatively thin, the contact area between the electrode and the phase changeable material pattern is relatively very small. As a result, it is possible to reduce power consumption of the phase changeable memory device and to form reliable and compact phase changeable memory cells.
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Number of Claims:
24
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Owner
Samsung Electronics Co., Ltd. (Suwon-si, Gyeonggi-do,KR)
Published
February 12, 2008
Application Number
11/173,720
Filed
June 30, 2005
US Classification
438/257   257/E27.004 257/E31.029 438/95
Int'l Classification
H01L   21/336   (20060101)  
Examiner
Parent Case
RELATED APPLICATION This application is a divisional of U.S. patent application Ser. No. 10/374,959, filed Feb. 25, 2003, now pending, which the contents of which are incorporated by reference.
USPTO Field of Search
438/95   438/257   257/E31.029  
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