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High density memory devices having improved channel widths and cell size
   
Document Number
US Patent 7332767
Issued Date
February 19, 2008
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Abstract
A memory device having decreased cell size and having transistors with increased channel widths. The sidewalls of the pillars and the top surface of the pillars are covered with a gate oxide and a conductive layer to form a channel through the pillars. The current path through the channel is approximately equal to twice the height of the pillar plus the width of the pillar. The pillars are patterned to form non-linear active area lines having angled segments. The conductive layer is patterned to from word lines that intersect the active area lines at the angled segments.
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Number of Claims:
26
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Published
February 19, 2008
Application Number
11/286,670
Filed
November 23, 2005
US Classification
257/317   257/315 257/365 257/E21.645 257/E21.703 257/E27.081 257/E27.084 257/E27.112
Int'l Classification
H01L   29/788   (20060101)  
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Parent Case
CROSS-REFERENCE TO RELATED APPLICATIONS The present application is a divisional of U.S. application Ser. No. 10/925,339, filed on Aug. 24, 2004.
USPTO Field of Search
257/907   438/128   438/197   438/587   438/982  
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