Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction. Disclosure also describes light deflecting apparatuses, light deflecting array apparatuses, image forming apparatuses, image projection display apparatuses, and optical data transmission apparatuses.
CROSS-REFERENCE TO RELATED APPLICATIONS
This application is a divisional of U.S. application No. 11/404,866, filed on Apr. 17, 2006, now U.S. Pat. No. 7,215,452, which is a divisional of U.S. application No. 11/092,841, filed on Mar. 30, 2005, now granted as U.S. Pat. No. 7,064,878, issued on Jun. 20, 2006, which is a continuation of U.S. application No. 10/294,033, filed on Nov. 14, 2002, now granted as U.S. Pat. No. 6,900,915, issued on May 31, 2005. This application is based upon and claims the benefits of priority from the prior Japanese Patent Application Nos. 2001-349415, filed on Nov. 14, 2001, 2002-178216, filed on Jun. 19, 2002, and 2002-282858, filed on Sep. 27, 2002. The entire contents of each of these documents are incorporated herein by reference.
Priority Data
Nov 14, 2001 [JP] 2001-349415 Jun 19, 2002 [JP] 2002-178216 Sep 27, 2002 [JP] 2002-282858
