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Methods for depositing copper on a noble metal layer of a work piece
 
   
Document Number
US Patent 7335288
Issued Date
February 26, 2008
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Abstract
Methods for electrodeposition of copper on a noble metal layer of a work piece are provided. An exemplary method includes exposing the noble metal layer to an electrodeposition composition. The electrodeposition composition comprises a copper salt, a suppressor, an accelerator and an electrolyte. The electrodeposition of copper on a surface of the noble metal layer is initiated by application of a predetermined current density to the work piece. The electrodeposition of copper is terminated upon the occurrence of a predetermined event.
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Number of Claims:
17
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Owner
Novellus Systems, Inc. (San Jose, CA)
Published
February 26, 2008
Application Number
10/666,432
Filed
September 18, 2003
US Classification
205/93   205/123 205/296 257/E21.174 257/E21.175 257/E21.585
Int'l Classification
C25D   3/38   (20060101)  
Assistant Examiner
USPTO Field of Search
205/93   205/123   205/296  
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