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Increasing adherence of dielectrics to phase change materials
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Document Number
US Patent 7338857
Issued Date
March 4, 2008
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Inventors
Besana; Paola
(Bareggio,IT)
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Marangon; Tina
(Merate,IT)
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Galbiati; Amos
(Grezzago,IT)
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Abstract
A phase change material is formed over a dielectric material. An impurity is introduced into the dielectric to improve the adherence of said dielectric to said phase change material.
Patent Report
Tags:
increasing
adherence
dielectrics
phase
change
materials
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Description:
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Number of Claims:
6
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Owner
Ovonyx, Inc.
(Rochester Hills, MI)
Published
March 4, 2008
Application Number
10/965,129
Filed
October 14, 2004
US Classification
438/257
257/E27.004 257/E31.029 257/E45.002 438/407 438/440
Int'l Classification
H01L 21/336 (20060101)
Examiner
Le; Thao P.
Attorney/Law Firm
Trop, Pruner & Hu, P.C.
USPTO Field of Search
257/3 257/E45.002 257/E45.042 257/E31.029 438/407 438/440
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