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Aberration-correcting cathode lens microscopy instrument
   
Document Number
US Patent 7348566
Issued Date
March 25, 2008
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Inventors
Tromp; Rudolf M. (North Salem, NY)
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Abstract
An aberration-correcting microscopy instrument is provided. The instrument has a first magnetic deflector disposed for reception of a first non-dispersed electron diffraction pattern. The first magnetic deflector is also configured for projection of a first energy dispersed electron diffraction pattern in an exit plane of the first magnetic deflector. The instrument also has an electrostatic lens disposed in the exit plane of a first magnetic deflector, as well as a second magnetic deflector substantially identical to the first magnetic deflector. The second magnetic deflector is disposed for reception of the first energy dispersed electron diffraction pattern from the electrostatic lens. The second magnetic deflector is also configured for projection of a second non-dispersed electron diffraction pattern in a first exit plane of the second magnetic deflector. The instrument also has an electron mirror configured for correction of one or more aberrations in the second non-dispersed electron diffraction pattern. The electron mirror is disposed for reflection of the second non-dispersed electron diffraction pattern to the second magnetic deflector for projection of a second energy dispersed electron diffraction pattern in a second exit plane of the second magnetic deflector.
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Number of Claims:
21
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Published
March 25, 2008
Application Number
11/364,299
Filed
February 28, 2006
US Classification
250/396R   250/305 250/310
Int'l Classification
G01J   1/42   (20060101)  
Examiner
Assistant Examiner
USPTO Field of Search
250/396R  
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