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Lateral phase change memory and method therefor
   
Document Number
US Patent 7358521
Issued Date
April 15, 2008
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Inventors
Wicker; Guy C. (Southfield, MI)
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Abstract
Briefly, in accordance with an embodiment of the invention, a lateral phase change memory and a method to manufacture a phase change memory is provided. The method may include forming a conductor material over a substrate and patterning the conductor material to form two electrodes from the conductor material, wherein the two electrodes are separated by a sub-lithographic distance. The method may further include forming a phase change material between the two electrodes.
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Number of Claims:
10
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Owner
Intel Corporation (Santa Clara, CA)
Published
April 15, 2008
Application Number
11/499,941
Filed
August 7, 2006
US Classification
257/3   257/4 257/42 257/E21.582 257/E27.004 257/E45.002 438/102 438/666 438/668 438/671
Int'l Classification
H01L   47/00   (20060101)  
Examiner
Attorney/Law Firm
Parent Case
CROSS-REFERENCE TO RELATED APPLICATIONS This application is a continuation of U.S. patent application Ser. No. 11/042,522, filed on Jan. 25, 2005, now Pat. No. 7,119,355, which is a divisional of U.S. patent application Ser. No. 10/319,204, filed on Dec. 13, 2002, which issued as U.S. Pat. No. 6,867,425.
USPTO Field of Search
257/3   257/E45.002  
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