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Substrate having a penetrating via and wiring connected to the penetrating via and a method for manufacturing the same
   
Document Number
US Patent 7365436
Issued Date
April 29, 2008
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Abstract
A disclosed substrate includes a base member having a through-hole, and a conductive metal filling in the through-hole so as to form a penetrating via. The penetrating via contains a conductive core member that is substantially at the central axis of the through-hole.
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Number of Claims:
6
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Published
April 29, 2008
Application Number
11/247,713
Filed
October 11, 2005
US Classification
257/774   257/734 257/773 257/778 257/786 257/E21.586 257/E21.597 257/E23.011 257/E23.067 438/629
Int'l Classification
H01L   23/48   (20060101)  
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Priority Data
Nov 08, 2004 [JP] 2004-323940
USPTO Field of Search
257/774  
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