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Irradiation device for testing objects coated with light-sensitive paint
 
   
Document Number
US Patent 7378666
Issued Date
May 27, 2008
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Abstract
The invention concerns an irradiation device for testing objects coated with light-sensitive paint, comprising a EUV radiation source, an optical system for filtering the radiation of the EUV radiation source a chamber for receiving the object, as well as systems for intersecting the trajectory of the rays on the object. The invention also concerns a method for operating such a device. The invention aims at obtaining as quickly as possible an illumination at least partly simultaneous of several irradiation fields, with different doses, by using an inexpensive laboratory radiation source without resorting to complex optical systems. Therefor, the invention provides a device comprising a simplified and compact optical system, with closable diaphragm apertures located in front of the object to be irradiated and at least one control sensor placed on the trajectory of the rays and enabling the radiation dose to be measured.
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Number of Claims:
20
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Owner
Qimonda AG (Munich,DE)
AIXUV GmbH (Aachen,DE)
Published
May 27, 2008
Application Number
10/530,964
Filed
October 8, 2003
US Classification
250/372  
Int'l Classification
G01J   1/42   (20060101)  
Examiner
Attorney/Law Firm
Priority Data
Oct 11, 2002 [DE] 102 47 626 Feb 10, 2003 [DE] 103 05 573
USPTO Field of Search
250/372  
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