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Phase changeable layers including protruding portions in electrodes thereof and methods of forming same
   
Document Number
US Patent 7385218
Issued Date
June 10, 2008
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Inventors
Lee; Se-Ho (Gyeonggi-do,KR)
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Abstract
A structure in a phase changeable memory cell can include a bottom electrode having an interlayer dielectric layer thereon, the bottom electrode can have a recess therein that extends beyond a boundary between the bottom electrode and the interlayer dielectric. A phase changeable layer can be formed in the recess and include a protruding potion of the phase changeable layer that protrudes into the bottom electrode beyond the boundary. Related methods are also disclosed.
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Number of Claims:
10
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Published
June 10, 2008
Application Number
10/692,578
Filed
October 24, 2003
US Classification
257/3   257/4 257/5 257/594 257/E27.004 257/E45.002
Int'l Classification
H01L   29/04   (20060101)  
Examiner
Priority Data
Oct 25, 2002 [KR] 10-2002-0065456
USPTO Field of Search
257/3   257/4   257/5   257/594  
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