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Organometallic compounds
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Document Number
US Patent 7390360
Issued Date
June 24, 2008
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Inventors
Shenai-Khatkhate; Deodatta Vinayak
(Danvers, MA)
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Woelk; Egbert
(North Andover, MA)
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Abstract
Compositions useful in the manufacture of compound semiconductors are provided. Methods of manufacturing compound semiconductors using these compositions are also provided.
Patent Report
Tags:
organometallic
compounds
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Description:
Amusing 0%
Clever 0%
Complex 0%
Efficient 0%
Historic 0%
Important 0%
Innovative 0%
Interesting 0%
Practical 0%
Simple 0%
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Number of Claims:
9
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Owner
Rohm and Haas Electronic Materials LLC
(Marlborough, MA)
Published
June 24, 2008
Application Number
11/237,999
Filed
September 28, 2005
US Classification
117/84
438/481
Int'l Classification
C30B 25/00 (20060101)
Examiner
Kunemund; Robert
Assistant Examiner
Chaet; Marissa W.
Attorney/Law Firm
Cairns; S. Matthew
Parent Case
This application claims the benefit of U.S. provisional application Ser. No. 60/616,079, filed on Oct. 5, 2004.
USPTO Field of Search
117/1 118/1 556/1 438/1 257/1
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