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Ultra-shallow photodiode using indium
   
Document Number
US Patent 7390685
Issued Date
June 24, 2008
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Abstract
The invention provides an imager having a p-n-p photodiode with an ultrashallow junction depth. A p+ junction layer of the photodiode is doped with indium to decrease transient enhanced diffusion effects, minimize fixed pattern noise and fill factor loss.
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Number of Claims:
23
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Published
June 24, 2008
Application Number
11/107,807
Filed
April 18, 2005
US Classification
438/57   257/E27.133
Int'l Classification
H01L   21/00   (20060101)  
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Parent Case
The present application is a divisional of Application No. 10/681,108, filed Oct. 9, 2003 now U.S. Pat. No. 7,057,220, the entire disclosure of which is incorporated herein by reference.
USPTO Field of Search
438/48   438/57   257/E27.131   257/E27.133  
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