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Semiconductor device having a capacitor and a fabrication method thereof
   
Document Number
US Patent 7393742
Issued Date
July 1, 2008
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Inventors
Park; Won-Mo (Seongnam-si,KR)
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Abstract
In a semiconductor device having a capacitor and a method of fabricating the same, the semiconductor device comprises a semiconductor substrate and an insulating layer on the semiconductor substrate, a contact plug electrically connected to the semiconductor substrate and formed in the contact hole, a buffer conductive layer pattern electrically connected to the contact plug and formed on the insulating layer and the contact plug, an etching stopping layer formed on the buffer conductive layer pattern, a gap between the buffer conductive layer pattern and the etching stopping layer, a capacitor lower electrode electrically connected to the buffer conductive layer pattern and formed on the buffer conductive layer pattern. The gap is filled by a portion of the capacitor lower electrode.
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Number of Claims:
16
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Published
July 1, 2008
Application Number
11/357,832
Filed
February 17, 2006
US Classification
438/253   257/E21.018 257/E21.019 438/239 438/240 438/244 438/254 438/255 438/256 438/396 438/398 438/399
Int'l Classification
H01L   21/8242   (20060101)  
Assistant Examiner
Attorney/Law Firm
Priority Data
Feb 21, 2005 [KR] 10-2005-0014242
USPTO Field of Search
438/244   438/254   438/256   438/387   438/399   438/657  
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