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Methods of forming electrically conductive plugs
 
   
Document Number
US Patent 7407885
Issued Date
August 5, 2008
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Inventors
Wang; Dapeng (Centerville, VA)
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Abstract
A method of forming an electrically conductive plug includes providing an opening within electrically insulative material over a node location on a substrate. An electrically conductive material is formed within the opening and elevationally over the insulative material. Some of the conductive material is removed effective to recess an outermost surface of the conductive material to from about 100 Angstroms to about 200 Angstroms from an outermost surface of the insulative material after said removing of some of the conductive material. After removing some of the conductive material, remaining volume of the opening over the conductive material is overfilled with an electrically conductive metal material different from that of the conductive material. The metal material is polished effective to form an electrically conductive plug within the opening comprising the conductive material and the metal material. Other aspects and implementations are contemplated.
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Number of Claims:
43
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Owner
Published
August 5, 2008
Application Number
11/127,943
Filed
May 11, 2005
US Classification
438/672   438/675
Int'l Classification
H01L   21/44   (20060101)  
Examiner
Attorney/Law Firm
USPTO Field of Search
438/637   438/629   438/672   438/675   257/E21.649  
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