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Measuring instrument and method for operating a measuring instrument for optical inspection of an object
   
Document Number
US Patent 7420670
Issued Date
September 2, 2008
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Inventors
Rinn; Klaus (Heuchelheim,DE)
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Abstract
A measuring instrument for optical inspection of an object includes a light source for illuminating an object; a detector; an illuminating beam path extending from the light source to the object; a detection beam path extending from the object to the detector; an illuminating optics disposed in the illuminating beam path and/or an imaging optics disposed in the detection beam path for imaging the object onto the detector; a position evaluation device for determining a distance between two points of the object; and an optical device for imposing a profile of a continuously monotonic function on an intensity of light from the light source. The optical device is disposed in at least one of a pupil plane of the imaging optics, a pupil plane of the illuminating optics, and a plane in the illuminating or imaging beam path conjugate with the pupil plane of the imaging optics or the pupil plane of the illuminating optics.
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Number of Claims:
18
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Owner
Published
September 2, 2008
Application Number
11/127,002
Filed
May 11, 2005
US Classification
356/237.4   356/237.5 356/635
Int'l Classification
G01N   21/00   (20060101)  
Assistant Examiner
Attorney/Law Firm
Priority Data
May 12, 2004 [DE] 10 2004 023 739
USPTO Field of Search
356/237.4   356/5   356/6   356/7   356/8   356/9   356/10   356/11   356/12   356/13   356/14   356/15   356/16   356/17   356/18   356/19   356/20   356/21   356/22   356/23   356/24.5   356/614  
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