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High sensitivity slitless ion source mass spectrometer for trace gas leak detection
   
Document Number
US Patent 7427751
Issued Date
September 23, 2008
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Abstract
A mass spectrometer includes a main magnet having spaced-apart polepieces which define a gap, the main magnet producing a magnetic field in the gap, an ion source to generate ions and to accelerate the ions into the magnetic field in the gap, the ion source located outside the gap, and an ion detector to detect a selected species of the ions generated by the ion source and deflected by the magnetic field. The ion detector is located in the gap at a natural focus point of the selected species of ions. The mass spectrometer may be used in a trace gas leak detector.
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Number of Claims:
16
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Owner
Varian, Inc. (Palo Alto, CA)
Published
September 23, 2008
Application Number
11/354,737
Filed
February 15, 2006
US Classification
250/298   250/281 250/285 250/299
Int'l Classification
B01D   59/44   (20060101)  
Examiner
Assistant Examiner
USPTO Field of Search
250/298  
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