An analytical technique for the accurate and precise measurement of trace water in chemical reagents, comprising the steps of combining a chemical reagent comprising .ltoreq.5 ppm water, with hexafluoroacetone (HFA), to form a sample mixture comprising at least the chemical reagent and a water derivative of hexafluoroacetone; and measuring the concentration of the water derivative of hexafluoroacetone by gas chromatography.
CROSS-REFERENCE TO RELATED APPLICATION
This is a continuation of U.S. patent application Ser. No. 10/107,885 filed Mar. 27, 2002, now U.S. Pat. No. 7,189,571 in the names of Alexander S. Borovik, Ziyun Wang, Chongying Xu and Thomas H. Baum for "METHOD FOR TRACE WATER ANALYSIS IN CYCLIC SILOXANES USEFUL AS PRECURSORS FOR LOW DIELECTRIC CONSTANT THIN FILMS," issued Mar. 13, 2007 as U.S. Pat. No. 7,189,571. The disclosure of said U.S. patent application Ser. No. 10/107,885 is hereby incorporated herein by reference, in its entirety. Priority is claimed under the provisions of 35 USC 120.
