An interdigitated Metal-Insulator-Metal (MIM) capacitor provides self-shielding and accurate capacitance ratios with small capacitance values. The MIM capacitor includes two terminals that extend to a plurality of interdigitated fingers separated by an insulator. Metal plates occupy layers above and below the fingers and connect to fingers of one terminal. As a result, the MIM capacitor provides self-shielding to one terminal. Additional shielding may be employed by a series of additional shielding layers that are isolated from the capacitor. The self-shielding and additional shielding may also be implemented at an array of MIM capacitors.
RELATED APPLICATION
This application claims the benefit of U.S. Provisional Patent Application No. 60/810,257, filed Jun. 2, 2006, the entire teachings of which are incorporated herein by reference.
