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Device for measuring in three dimensions a topographical shape of an object
   
Document Number
US Patent 7446885
Issued Date
November 4, 2008
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Abstract
A device for measuring in three dimensions a topographical shape of an object. The device comprises an arrayed confocal imaging system having a confocal topographical mask provided for converting light produced by a light source into an array of small spots. The mask being mounted on a scanning member provided for moving the mask over successive positions over a predetermined distance. The device further comprises a confocal objective provided for mapping at successive object-position-in-focus the array of small spots output at said successive positions. The confocal objective may be mounted at a fixed position within said device.
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Number of Claims:
18
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Owner
Published
November 4, 2008
Application Number
10/513,989
Filed
May 15, 2003
US Classification
356/601  
Int'l Classification
G01B   11/24   (20060101)  
Assistant Examiner
Attorney/Law Firm
Priority Data
May 15, 2002 [EP] 02076972
USPTO Field of Search
356/601  
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