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Fabrication method of packaging substrate and packaging method using the packaging substrate
 
   
Document Number
US Patent 7452809
Issued Date
November 18, 2008
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Abstract
A fabrication method of a packaging substrate includes the steps of: forming a recess by etching a predetermined area of a lower surface of a substrate; depositing a seed layer on an upper surface of the substrate; in the recess, etching predetermined area(s) of the lower surface of the substrate and forming at least one via hole that reaches the seed layer; and plating the inside of the via hole by using the seed layer, and forming electrode(s) for electrically coupling the upper and lower parts of the substrate. First and second pads coupled to the electrode(s) may be formed on the upper and lower parts of the substrate, respectively. Thus, using the second pads as bonding materials, the packaging process becomes easier, which resultantly simplifies the fabrication process of the packaging substrate and the packaging process.
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Number of Claims:
12
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Published
November 18, 2008
Application Number
11/240,771
Filed
October 3, 2005
US Classification
438/675   29/825
Int'l Classification
H01L   21/44   (20060101)   H01R   43/00   (20060101)  
Examiner
Attorney/Law Firm
Priority Data
Oct 28, 2004 [KR] 10-2004-0086676
USPTO Field of Search
438/666   438/667   438/674   438/675  
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