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Simplified wafer alignment
 
   
Document Number
US Patent 7453160
Issued Date
November 18, 2008
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Inventors
Ray; Andrew M. (Newburyport, MA)
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Abstract
The present invention is directed to aligning wafers within semiconductor fabrication tools. More particularly, one or more aspects of the present invention pertain to quickly and efficiently finding an alignment marking, such as an alignment notch, on a wafer to allow the wafer to be appropriately oriented within an alignment tool. Unlike conventional systems, the notch is located without firmly holding and spinning or rotating the wafer. Exposure to considerable backside contaminants is thereby mitigated and the complexity and/or cost associated with aligning the wafer is thereby reduced.
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Number of Claims:
15
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Published
November 18, 2008
Application Number
10/830,734
Filed
April 23, 2004
US Classification
257/797   414/744.6 414/935
Int'l Classification
H01L   23/544   (20060101)  
Assistant Examiner
Attorney/Law Firm
USPTO Field of Search
257/283   257/797   438/401   438/462   438/975   438/FOR435   700/114   700/157   414/744.6   414/754   414/784   414/780   414/800   414/936   414/935  
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