A MEMS-based silicon CTD sensor for ocean environment is presented. The sensor components are a capacitive conductivity sensor, a gold doped silicon temperature sensor, and a multiple diapghram piezoresistive pressure sensor. The sensor elements have further been packaged to protect them from harsh marine environment. The sensor components showed good linear response, resolution and mechanical integrity to the harsh ocean environment.
CROSS REFERENCE TO RELATED APLICATIONS
This application claims priority to currently pending U.S. Provisional Patent Application 60/672,802, entitled, "Conductivity Sensor for Marine Applications", filed Apr. 19, 2005.
