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Method of forming pixel sensor cell having reduced pinning layer barrier potential
 
   
Document Number
US Patent 7459360
Issued Date
December 2, 2008
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Abstract
A method of forming a pixel sensor cell structure. The method of forming the pixel cell comprises forming a doped layer adjacent to a first side of a transfer gate structure for coupling a collection well region and a channel region. Potential barrier interference to charge transfer caused by a pinning layer is reduced.
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Number of Claims:
11
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Published
December 2, 2008
Application Number
11/681,454
Filed
March 2, 2007
US Classification
438/199   257/233 257/E27.131 257/E27.132 257/E31.032
Int'l Classification
H01L   21/8238   (20060101)  
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Parent Case
This application is a divisional of U.S. application Ser. No. 10/907,570; filed on Apr. 6, 2005, now U.S. Pat. No. 7,205,591.
USPTO Field of Search
257/E27.131   257/E27.132   438/199   438/E27.141   438/E27.152  
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