or
Bookmark and Share
Phase change RAM device with increased contact area between word line and active area
 
   
Document Number
US Patent 7470924
Issued Date
December 30, 2008
Link
Inventors
Song; Byoung Ok (Chungcheongbuk-do,KR)
Map
Abstract
A phase change RAM device, has a first metal wiring for a bit line that is separated from a second metal wiring for applying a supply voltage. A method for fabricating the phase change RAM device includes the steps of forming an isolation layer formed so as to define a T-shaped active area in the semiconductor substrate, forming a word line formed on the active area of the semiconductor substrate including the isolation layer, forming source/drain areas formed at both sides of the word line in the active area, forming an insulating interlayer on entire surface of the semiconductor substrate so as to cover the word line, and forming a first tungsten plug in a portion of the insulating interlayer on the source area and a second tungsten plug in a portion of the insulating interlayer on the drain area.
Tags:
Description:
Amusing 0%
Clever 0%
Complex 0%
Efficient 0%
Historic 0%
Important 0%
Innovative 0%
Interesting 0%
Practical 0%
Simple 0%
Number of Claims:
8
Comments:
no comments yet
Owner
Hynix Semiconductor Inc. (Kyoungki-do,KR)
Published
December 30, 2008
Application Number
11/438,872
Filed
May 23, 2006
US Classification
257/5   257/E27.004
Int'l Classification
H01L   29/06   (20060101)   H01L   47/00   (20060101)  
Assistant Examiner
Attorney/Law Firm
Priority Data
May 26, 2005 [KR] 10-2005-0044598
USPTO Field of Search
257/3   257/4   257/5   257/296  
Related Patents
Claims
Description
About| FAQs| Terms & Disclaimer| Link to Us| Contact Us