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Deformable mirror
 
   
Document Number
US Patent 7474455
Issued Date
January 6, 2009
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Abstract
A deformable mirror includes a deformable section on which a reflecting surface and a COM electrode are formed, a fixing section which fixes the deformable section, a driving and sensing electrode (driving force generating unit) which has a plurality of driving and sensing electrodes provided facing the COM electrode, and which drives the deformable section by applying an electric potential difference between the COM electrode and the driving and sensing electrode, and a capacitance detecting circuit which detects simultaneously a plurality of capacitances between the COM electrode and the driving and sensing electrode.
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Number of Claims:
5
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Published
January 6, 2009
Application Number
11/710,807
Filed
February 26, 2007
US Classification
359/291   359/224.1 359/231 359/295 359/846
Int'l Classification
G02B   26/00   (20060101)   G02B   26/02   (20060101)   G02B   26/08   (20060101)  
Examiner
Priority Data
Mar 16, 2006 [JP] 2006-072368
USPTO Field of Search
359/290   359/291   359/295   359/298   359/223   359/224   359/230   359/231   359/843   359/846   359/847   385/16   385/17   385/18   385/19   385/20   385/21   385/22   385/23   348/208.1   348/208.11   348/362   348/E5.028   348/E5.038   73/65.01   73/514.32   310/309   356/505   356/521   248/346.01   438/29   438/52   396/55   361/280   216/24  
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