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Semiconductor devices having phase change memory cells, electronic systems employing the same and methods of fabricating the same
   
Document Number
US Patent 7482616
Issued Date
January 27, 2009
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Abstract
In one embodiment, a phase-change memory device has an oxidation barrier layer to protect against memory cell contamination or oxidation and a method of manufacturing the same. In one embodiment, a semiconductor memory device comprises a molding layer overlying a semiconductor substrate. The molding layer has a protrusion portion vertically extending from a top surface thereof. The device further includes a phase-changeable material pattern adjacent the protrusion portion and a lower electrode electrically connected to the phase-changeable material pattern.
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Number of Claims:
67
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Owner
Samsung Electronics Co., Ltd. (Suwon-si, Gyeonggi-do,KR)
Published
January 27, 2009
Application Number
11/139,283
Filed
May 27, 2005
US Classification
257/2   257/3 257/4 257/52 257/55 257/616 257/63 257/E27.004 257/E45.002 438/95
Int'l Classification
H01L   29/02   (20060101)  
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Parent Case
CROSS-REFERENCE TO RELATED APPLICATION The present application is a continuation-in-part of U.S. patent application Ser. No. 11/027,255, filed Dec. 30, 2004, now issued as U.S. Pat. No. 7,411,208, which claims priority from Korean Patent Application No. 2004-37965, filed on May 27, 2004. Also, the present application claims the priority from Korean Patent Application Nos. 2004-105905 and 2005-31662, filed Dec. 14, 2004 and Apr. 15, 2005, respectively. The disclosures of all of the above applications are incorporated herein by reference in their entirety.
Priority Data
May 27, 2004 [KR] 10-2004-0037965 Dec 14, 2004 [KR] 10-2004-0105905 Apr 15, 2005 [KR] 10-2005-0031662
USPTO Field of Search
257/2  
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