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Tools for polishing and associated methods
 
   
Document Number
US Patent 7494404
Issued Date
February 24, 2009
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Inventors
Sung; Chien-Min (Tansui, Taipei County 251,TW)
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Abstract
Polishing tools and associated methods are disclosed. In one aspect, a tool for polishing a work piece is provided. Such a tool may include a solid substrate with a greater than 10 wt % graphite having a high degree of graphitization. The solid substrate may have a working surface which has asperities having a tip-to-tip RA value of less than or equal to about 10 .mu.m, and the working surface may have a surface roughness RA value of less than or equal to about 50 .mu.m. A method for making such a tool and a method for polishing a work piece are also presented.
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Number of Claims:
17
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Published
February 24, 2009
Application Number
11/825,518
Filed
July 6, 2007
US Classification
451/527   451/539
Int'l Classification
B24D   11/00   (20060101)  
Examiner
Attorney/Law Firm
Parent Case
RELATED APPLICATIONS This application is a continuation-in-part of U.S. patent application Ser. No. 11/543,761 filed Oct. 4, 2006, now U.S. Pat. No. 7,285,039 and of U.S. patent application Ser. No. 11/706,132 filed Feb. 12, 2007, now abandoned each of which is a continuation-in-part of U.S. patent application Ser. No. 11/357,712, filed Feb. 17, 2006, now U.S. Pat. No. 7,241,206 all of which are incorporated herein by reference in their entirety.
USPTO Field of Search
451/56   451/57   451/59   451/526   451/527   451/528   451/529   451/530   451/531   451/532   451/533   451/534   451/535   451/536   451/537   451/538   451/539   451/526   451/527   451/528   451/529   451/530   451/531   451/532   451/533   451/534   451/535   451/536   451/537   451/538   451/539   451/443   51/293   51/295   51/307   51/309  
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