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Method for making through-hole conductors for semiconductor substrates
   
Document Number
US Patent 7494925
Issued Date
February 24, 2009
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Abstract
A method, structure and system for forming a through-hole conductor in a semiconductor substrate includes forming a hole having an inner surface from a first side of the semiconductor substrate to a second side of the semiconductor substrate and plating the inner surface of the semiconductor substrate to form a conductive element when a plating solution is forced from the first side of the semiconductor substrate to the second side of the semiconductor substrate through the hole. The hole is plated in a generally planar plating topology from the first side to the second side of the semiconductor substrate. The through-hole conductor may be formed in a plating system where the semiconductor substrate forms at least a partial partition between a higher pressure bath and a lower pressure bath with the plating solution passing through the hole causing plating within the inner surface of the hole.
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Number of Claims:
9
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Published
February 24, 2009
Application Number
10/784,436
Filed
February 23, 2004
US Classification
438/667   438/629 438/674
Int'l Classification
H01L   21/00   (20060101)  
Examiner
Attorney/Law Firm
USPTO Field of Search
438/667   438/674   438/629  
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