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Through-hole conductors for semiconductor substrates and method for making same
   
Document Number
US Patent 7498258
Issued Date
March 3, 2009
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Abstract
A method, structure and system for forming a through-hole conductor in a semiconductor substrate includes forming a hole having an inner surface from a first side of the semiconductor substrate to a second side of the semiconductor substrate and plating the inner surface of the semiconductor substrate to form a conductive element when a plating solution is forced from the first side of the semiconductor substrate to the second side of the semiconductor substrate through the hole. The hole is plated in a generally planar plating topology from the first side to the second side of the semiconductor substrate. The through-hole conductor may be formed in a plating system where the semiconductor substrate forms at least a partial partition between a higher pressure bath and a lower pressure bath with the plating solution passing through the hole causing plating within the inner surface of the hole.
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Number of Claims:
7
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Published
March 3, 2009
Application Number
11/256,791
Filed
October 24, 2005
US Classification
438/667   438/629 438/674
Int'l Classification
H01L   21/00   (20060101)  
Examiner
Attorney/Law Firm
Parent Case
CROSS-REFERENCE TO RELATED APPLICATION This application is a divisional of application Ser. No. 10/784,436, filed Feb. 23, 2004, pending.
USPTO Field of Search
438/667   438/674   438/629  
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