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Method and instrument for collecting fourier transform (FT) Raman spectra for imaging applications
 
   
Document Number
US Patent 7518728
Issued Date
April 14, 2009
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Abstract
An instrument having an illumination source configured to illuminate a field of illumination on a surface of a substrate that is configured to hold a sample. The field of illumination typically has a diameter greater than 1 micron or an area greater than that of at least one pad of an array. The instrument also includes an interferometer, and a detectors. The instrument is configured to perform Fourier transform imaging without single spot scanning or without line scanning. Additionally, the instrument may include an illumination light source, an array detector and spectral processing electronics. A method of collecting Fourier transform (FT) data is also disclosed.
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Number of Claims:
62
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Owner
Intel Corporation (Santa Clara, CA)
Published
April 14, 2009
Application Number
11/239,118
Filed
September 30, 2005
US Classification
356/456  
Int'l Classification
G01B   9/02   (20060101)   G01J   3/45   (20060101)  
USPTO Field of Search
356/451   356/456  
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