Methods and systems for determining information about the incident angle of a beam are disclosed, the method including directing a beam having an s-polarized component and a p-polarized component to reflect from an interface at a non-normal angle, where the non-normal reflection introduces for each component a phase change upon reflection that is different for each component, and measuring an optical interference signal related to the phase change between the components of the reflected beam.
CROSS-REFERENCE TO RELATED APPLICATIONS
This application claims priority to U.S. Provisional Patent Application No. 60/708,736, entitled "ANGLE INTERFEROMETERS," filed on Aug. 16, 2005, the entire contents of which are incorporated herein by reference.
