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Document Number
US Patent 7534163
Issued Date
May 19, 2009
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Abstract
An improved polishing pad for polishing semi-conductors and other planar substrates in the presence of a slurry which optionally may contain abrasive particles is disclosed. The polishing pad comprises a non-woven fibrous component, a portion which may optionally comprise bicomponent fibers, optionally embedded within a polymer matrix component.
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Number of Claims:
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Owner
innoPad, Inc. (Peabody, MA)
Published
May 19, 2009
Application Number
12/039,056
Filed
February 28, 2008
US Classification
451/41   451/532
Int'l Classification
B24B   7/19   (20060101)  
Examiner
Parent Case
CROSS REFERENCE TO RELATED APPLICATIONS The present application is a divisional of U.S. patent application Ser. No. 11/424,466, filed on Jun. 15, 2006, entitled "Polishing Pad," which is a divisional of U.S. application Ser. No. 10/843,111, filed May 11, 2004, entitled "Polishing Pad," now U.S. Pat. No. 7,086,932, the disclosures of which are incorporated by reference herein in their entireties.
USPTO Field of Search
451/28   451/36   451/41   451/526   451/527   451/528   451/529   451/530   451/531   451/532   451/533   451/534   451/535   451/536   451/537   451/538   451/539   51/289   51/290   51/291   51/292   51/293   51/294   51/295   51/296   51/297   51/298   51/299   51/300   428/295.1   428/297.4  
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