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Power semiconductor package having integral fluid cooling
 
   
Document Number
US Patent 7538425
Issued Date
May 26, 2009
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Abstract
A power semiconductor device package utilizes integral fluid conducting micro-channels, one or more inlet ports for supplying liquid coolant to the micro-channels, and one or more outlet ports for exhausting coolant that has passed through the micro-channels. The semiconductor device is mounted on a single or multi-layer circuit board having electrical and fluid interconnect features that mate with the electrical terminals and inlet and outlet ports of the device to define a self-contained and self-sealed micro-channel heat exchanger.
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Number of Claims:
7
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Published
May 26, 2009
Application Number
10/900,538
Filed
July 28, 2004
US Classification
257/714   257/730 257/E23.095
Int'l Classification
H01L   23/34   (20060101)  
Examiner
Assistant Examiner
Attorney/Law Firm
USPTO Field of Search
257/724   257/714   257/715   257/716   257/717   257/678   257/685   257/686   257/685   257/686   257/722   257/730   257/731   257/773   257/786   257/E23.095   257/E23.097   257/E23.098  
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