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Organometallic compounds
   
Document Number
US Patent 7547631
Issued Date
June 16, 2009
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Abstract
Organometallic compounds containing a phosphoamidinate ligand are provided. Such compounds are particularly suitable for use as vapor deposition precursors. Also provided are methods of depositing thin films, such as by ALD and CVD, using such compounds.
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Number of Claims:
12
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Published
June 16, 2009
Application Number
11/542,923
Filed
October 4, 2006
US Classification
438/680   106/1.25 427/248.1 438/681 556/18 556/20 564/15
Int'l Classification
H01L   21/44   (20060101)   C23C   16/00   (20060101)  
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Parent Case
This application claims the benefit of U.S. Provisional Application Ser. No. 60/834,479, filed on Jul. 31, 2006.
USPTO Field of Search
556/18   556/20   438/680   438/681   427/248.1   106/1.25   564/15  
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