Displacement and flatness measurements by use of a laser with diffractive optic beam shaping and a multiple point sensor array using the back reflection of an illuminating laser beam
A laser beam system for measuring an aspect of a surface wherein a laser beam is reshaped into a corrected shaped laser beam having a corrected energy profile and subsequently reshaped into a measurement shaped laser beam having an measurement energy profile shaped to be effected by the at least one aspect of the surface. The measurement shaped laser beam is reflected from the surface, being modified by the aspect of interest of the surface, and to a sensor array wherein the sensors measure the reflected laser beam to determine the aspect of interest of the surface.
CROSS REFERENCES TO RELATED APPLICATIONS
The present patent application claims benefit of Provisional Patent Application Ser. No. 60/629,941 filed Nov. 22, 2004 and is a continuation-in-part of and claims the benefit of U.S. patent application Ser. No. 11/259,525 filed Oct. 26, 2005, now U.S. Pat. No. 7,307,711 which in turn claims benefit of Provisional Patent Application Ser. No. 60/623,494 filed Oct. 29, 2004 and Provisional Patent Application Ser. No. 60/652,293 filed Feb. 11, 2005.
