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Electromagnetic treatment in atmospheric-plasma coating process
   
Document Number
US Patent 7557019
Issued Date
July 7, 2009
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Abstract
A plasma is produced in a treatment space (58) by diffusing a plasma gas at atmospheric pressure and subjecting it to an electric field created by two metallic electrodes (54,56) separated by a dielectric material (64), and a precursor material is introduced into the treatment space to coat a substrate film or web (14) by vapor deposition or atomized spraying at atmospheric pressure. The deposited precursor exposed to an electromagnetic field (AC, DC, or plasma) and then it is cured by electron-beam, infrared-light, visible-light, or ultraviolet-light radiation, as most appropriate for the particular material being deposited. Additional plasma post-treatment may be used to enhance the properties of the resulting coated products.
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Number of Claims:
15
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Published
July 7, 2009
Application Number
11/633,995
Filed
December 5, 2006
US Classification
438/485   257/E21.094 438/479 438/513 438/710 438/99
Int'l Classification
H01L   21/20   (20060101)  
Examiner
Attorney/Law Firm
Parent Case
RELATED APPLICATIONS This application is a continuation-in-part of U.S. Ser. No. 11/448,966, filed on Jun. 7, 2006 (issued as U.S. Pat. No. 7,300,859), which is a continuation-in-part of U.S. Ser. No. 10/883,167, filed on Jul. 1, 2004 (issued as U.S. Pat. No. 7,067,405), which is a continuation-in-part of U.S. Ser. No. 10/228,358, filed on Aug. 26, 2002 (issued as U.S. Pat. No. 6,774,018), which is a continuation-in-part of Ser. No. 09/660,003, filed on Sep. 12, 2000 (issued as U.S. Pat. No. 6,441,553), which is a continuation-in-part of Ser. No. 09/241,882, filed on Feb. 1, 1999 (issued as U.S. Pat. No. 6,118,218).
USPTO Field of Search
438/99   438/479   438/485   438/513   438/710  
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